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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH0478169(A)
申请公布日期
1992.03.12
申请号
JP19900192277
申请日期
1990.07.20
申请人
FUJITSU LTD
发明人
OSHIDA SUMIKO
分类号
H01L29/78;H01L21/336
主分类号
H01L29/78
代理机构
代理人
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