| 摘要 |
PURPOSE:To improve the reliability of deterioration detection, by installing a passage changeover means which introduces resist exfoliating liquid to a storage means, which stores resist liquid and vaporizes and eliminates solvent in the liquid, mixes the liquid with resist in the resist liquid, and introduces it to a deterioration detection means. CONSTITUTION:In a flow route 1, a three-way solenoid valve 4 and a three-way solenoid valve 5 are installed in order in the lower stream side of a pump 3; in the lower stream side of the valve 5, an absorbance meter 6 for resist exfoliating liquid is installed; the resist exfoliating liquid is irradiated with light of a specified wavelength, thereby measuring absorbance of resist exfoliating liquid. The resist liquid in a storage part 10, which stores resist liquid, is guided to a thermostatic chamber 13 through a passage 12 in which a pump 11 for transportation is installed. The thermostatic chamber 13 heats the resist liquid supplied through the passage 12, and vaporizes solvent in the resist liquid, thereby obtaining, from the resist liquid, the resist being a solute in a solidified state. |
