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发明名称
PRODUCTION OF SEMICONDUCTOR
摘要
申请公布号
JPH0474865(A)
申请公布日期
1992.03.10
申请号
JP19900186205
申请日期
1990.07.12
申请人
FUJITSU LTD
发明人
OBA TAKAYUKI;SUZUKI TOSHIYA;HARA SHIGE;MISAWA NOBUHIRO
分类号
C23C16/00;C23C16/08;H01L21/3205
主分类号
C23C16/00
代理机构
代理人
主权项
地址
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