| 摘要 |
PURPOSE:To improve a polishing accuracy, by using a driving pulley and transmission pulley provided with taper on the outer periphery of a surface plate with the rotation of the surface plate being utilized, and adjusting the azimuth speed of a correction ring and that of the surface plate identically with this space being joined by an O ring for transmission. CONSTITUTION:A rotation force is taken out of the side face of a rotating surface plate1 by a driving pulley 5 closely fitted to the surface plate 1 side face, the rotation force fed from the surface plate 1 is transmitted to a transmission pulley 4 via an O ring 6 for transmission and a correction ring 2 in which the body 3 to be polished is stored, is driven with its rotation to the inner diameter side by the transmission pulley 4 fixed to a plate 11 and an auxiliary pulley 7. Consequently, the polishing in a high accuracy with less vibration and small rotation error can be performed. |
