| 摘要 |
PURPOSE:To form a desired V-groove shape by irradiant the pattern area of an optical master disk with a laser light as well and detecting '0'-order and + or - primary diffracted light quantity signals obtained by forming a pattern being in the course of development, and correcting the deterioration of the '0'-order and + or - primary diffracted light quantity signals caused by the influence of a developer for covering the pattern area. CONSTITUTION:The device is provided with a diffracted light quantity detecting part 8 for detecting the diffracted light quantity of '0'-order light (b) and + or - primary light (c), (d) which follow an advance of development by irradiating a pattern area with a laser light 5, a light quantity correcting part 10 for correcting the light quantity detected by the diffracted light quantity detecting part 8, and an arithmetic unit 11 for calculating a diffracted light quantity ratio from the diffracted light quantity whose light quantity is corrected. In such a case, by irradiating the pattern area of a disk master disk with a laser light, a diffracted light quantity ratio is calculated from '0'-order and + or - primary diffracted light quantities obtained by executing a correction of the light quantity drop quantity caused by a layer of a developer being in the course of development to the '0'-order and + or - primary diffracted light quantities obtained in connection with an advance of development, and when this diffracted light quantity ratio becomes a desired value, the development is stopped. In such a way, a desired shape can be obtained without shifting the timing of a stop. |
