| 摘要 |
PURPOSE:To give a laser trimming device capable of cutting a fuse perfectly without damaging a peripheral passivation film by cutting the fuse with laser beam, then, measuring the resistance value and setting the irradiating time of the laser beam from this resistance value. CONSTITUTION:The irradiating time is set by the irradiation control part 7 of laser beam to a minimum time t1. Then, the shutter of a laser beam oscillator 1 is opened for time t1 and the laser beam irradiates a dummy fuse. Then, a probe part 13 is brought into contact with both ends of the fuse and the resistance value (current value) is measured. When the resistance value value i0 of a dummy fuse is larger than i1, i0 and ii are compared with each other, an interpolated time for only the difference part is operated by the measured data operation part 16, the laser beam irradiates the dummy fuse for t1+DELTAt, then, the resistance value is measured again. At this time, when the resistance value is smaller than this i1, the laser beam is moved to the actual position of the fuse and the laser beam irradiates the fuse for the illuminating time t1+DELTAt and cuts it. |
