| 摘要 |
PURPOSE:To effectively set manufacturing conditions in a short time in order to stably manufacture high quality products with a good yield in diversified small-quantity LSI production lines by a method wherein processing historical and actual performance data of manufacturing facilities are acquired in a database of facilities actual control system and analyzed by comparing it with the processing of the present unfinished products. CONSTITUTION:First, an actual processing with respect to inputted products is performed in manufacturing facilities, and the results are automatically recorded or manually acquired, and accumulated and controlled in a facilities actual control system provided. Next, manufacturing conditions with respect to unfinished products in the manufacturing facilities are set. From a database of the facilities actual control system, data related to a process, kind, manufacturing step, manufacturing conditions of the like identical to the unfinished products are retrieved to schematize each interval and plot. Then, the facilities properties, technical knowledge, knowhow and the like are added to the compared results of these data to analyze them, whereby the facilities state at the present time and the actual tendency are grasped and a feedback correction is added to set the manufacturing conditions. |
