| 摘要 |
PURPOSE:To regulate the fitting position and fitting posture adjustment of the member to be polished easily and with high accuracy, by arranging two members for driving in the orthogonal direction with the flap direction of a movable part, setting each insertion quantity of the driving member properly and forming a structure capable of adjusting not only the height but also the inclination of the member to be polished with the movable part being subjected to bent deformation and torsional deformation elastically. CONSTITUTION:A member 6 to be polished is fixed to a movable plate 3, this movable plate 3 is fitted to a fixed plate 2 and the movable plate 3 fixed with the member 6 to be polished is adjusted at its fitting state even in the height direction and in the inclination direction as well by the two driving members to the fixed plate 2. The position of the member 6 to be polished after this adjustment is held with its fixture, correctly, and the polishing target layer of the member 6 to be polished is polished parallel to the bottom face of a sample base 1 and in the specified height. |
