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经营范围
发明名称
SEMICONDUCTOR WAFER
摘要
申请公布号
EP0438127(A3)
申请公布日期
1992.03.04
申请号
EP19910100434
申请日期
1991.01.16
申请人
KABUSHIKI KAISHA TOSHIBA;TOSHIBA MICRO-ELECTRONICS CORPORATION
发明人
SAKUMOTO, AIICHIRO, C/O INTELLECTUAL PROPERTY DIV.;KAWAKAMI, MICHICHIRO, C/O INTELLECTUAL PROP. DIV.
分类号
H01L21/78;G01R31/26;G01R31/28;H01L21/66;H01L23/58;(IPC1-7):H01L21/66
主分类号
H01L21/78
代理机构
代理人
主权项
地址
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