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发明名称
SPUTTERING APPARATUS
摘要
申请公布号
JPH0466663(A)
申请公布日期
1992.03.03
申请号
JP19900176342
申请日期
1990.07.05
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
MATSUOKA SHIGETO;ONO KENICHI;ONO TOSHIRO;HIRUKAWA YOUICHI
分类号
C23C14/34;C23C14/35
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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