PLASMA PROCESSING BOAT,申请号JP19890299986-传众专利搜索

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发明名称	PLASMA PROCESSING BOAT
摘要
申请公布号	JPH03159227(A)	申请公布日期	1991.07.09
申请号	JP19890299986	申请日期	1989.11.17
申请人	TOKYO ELECTRON SAGAMI LTD	发明人	IIZUKA HIROSHI
分类号	H01L21/302;C23C16/50;H01L21/205;H01L21/3065;H01L21/31	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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