| 摘要 |
PURPOSE:To mount only acceptable pellets by checking characteristics of semiconductor pellets which are supplied from a pellet supplying stage and carried on a mounting stage. CONSTITUTION:A characteristics checking electrode needle 5 retreats from a check position at the time of moving operation of a pellet. At the time of checking characteristics, the pin 5 comes into contact with an electrode 11 on the pellet 1 surface and with a characteristics checking stage 4. Pellet characteristics are checked between the characteristics checking electrode pin 5 and the pellet characteristics checking stage 4. At the time of checking pellet characteristics, positioning equipments 6 whose tips are made of ceramics pinch the pellet 1 from the diagonal line direction and perform positioning. Hence the deviation of contact position between the electrode on the pellet surface and the characteristics checking electrode pin 5 and the deviation of the next mounting position are prevented. The pellet after characteristics are checked is mounted on a lead frame 8 on a mounting stage 9 by second pick-up arm 7. Unacceptable pellets in the characteristic check are not mounted and abandoned. |
