,申请号JP19870231503-传众专利搜索

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发明名称
摘要
申请公布号	JPH0411520(B2)	申请公布日期	1992.02.28
申请号	JP19870231503	申请日期	1987.09.14
申请人		发明人
分类号	C30B33/00;C30B33/02;H01L21/324	主分类号	C30B33/00
代理机构		代理人
主权项
地址

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