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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH0462867(A)
申请公布日期
1992.02.27
申请号
JP19900167142
申请日期
1990.06.25
申请人
MATSUSHITA ELECTRON CORP
发明人
UMEMOTO TOSHIAKI
分类号
H01L27/04;H01L21/822
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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