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发明名称
HEAT TREATMENT OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH0462840(A)
申请公布日期
1992.02.27
申请号
JP19900166354
申请日期
1990.06.25
申请人
KAWASAKI STEEL CORP
发明人
ONODERA KIYOSHI;SHIMAZU KATSUHIRO
分类号
H01L21/31;H01L21/22
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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