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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0461323(A)
申请公布日期
1992.02.27
申请号
JP19900172104
申请日期
1990.06.29
申请人
TOSHIBA CORP
发明人
AOYAMA TOMONORI;SUGURO KYOICHI
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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