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发明名称
DUMMY WAFER
摘要
申请公布号
JPH0461331(A)
申请公布日期
1992.02.27
申请号
JP19900173418
申请日期
1990.06.29
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
TOYODA SHINICHIRO;MATSUSHITA YOSHINARI;YAMAMOTO SHIGEYUKI;KANAYAMA AKIHIKO
分类号
H01L21/205;H01L21/02;H01L21/31
主分类号
H01L21/205
代理机构
代理人
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地址
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