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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0462870(A)
申请公布日期
1992.02.27
申请号
JP19900166050
申请日期
1990.06.25
申请人
MITSUBISHI ELECTRIC CORP
发明人
MORIHARA TOSHINORI
分类号
H01L21/3205;H01L21/768;H01L23/52;H01L27/10;H01L27/108;H01L29/417
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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