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发明名称
SEMICONDUCTOR INTEGRATION METHOD
摘要
申请公布号
JPH0462969(A)
申请公布日期
1992.02.27
申请号
JP19900174672
申请日期
1990.07.02
申请人
MITSUBISHI ELECTRIC CORP
发明人
KANEMOTO HIDEHIRO
分类号
H01L27/118;H01L21/82
主分类号
H01L27/118
代理机构
代理人
主权项
地址
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