摘要 |
PURPOSE:To make optical systems compact and to easily take a measurement with high accuracy by matching the optical axes of a projection and an incidence optical system with each other and setting the optical axes of the projection optical system and a reflection optical system by an incidence angle setting device so that light is made incident at a tilt angle equal or close to the angle of polarization of the sample and an object to be measured. CONSTITUTION:The same optical axis 27 as the optical axis 27 of the projection optical system is provided, the light is reflected by a reflecting body 34, and its reflected light is transmitted through the sample 11 again and guided to a photodetection sensor 38; and the incidence angle setting means sets the optical axis 27 at the tilt angle equal or close to the angle of polarization of the sample 11. The light which is made incident on the sample 11 from the incidence optical system is therefore made incident on the sample 11 at the angle equal or close to the angle of polarization of the sample 11, transmitted in the sample 11 without multipath reflection, and absorbed by the object to be measured which is included in the sample 11. Then the content of the object to be measured is calculated from the absorbance and the arithmetic result is outputted. Consequently, the amount of the object to be measured can be detected with high accuracy and the optical systems can be made compact. |