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发明名称
PLASMA REACTOR
摘要
申请公布号
JPH0456774(A)
申请公布日期
1992.02.24
申请号
JP19900170807
申请日期
1990.06.25
申请人
MITSUBISHI ELECTRIC CORP
发明人
FUJIWARA NOBUO
分类号
C23C16/50;C23F4/00;H01L21/205;H01L21/302;H01L21/3065
主分类号
C23C16/50
代理机构
代理人
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地址
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