COMPOUND SEMICONDUCTOR CRYSTAL GROWTH APPARATUS,申请号JP19900163765-传众专利搜索

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发明名称	COMPOUND SEMICONDUCTOR CRYSTAL GROWTH APPARATUS
摘要
申请公布号	JPH0455392(A)	申请公布日期	1992.02.24
申请号	JP19900163765	申请日期	1990.06.21
申请人	SUMITOMO ELECTRIC IND LTD	发明人	MATSUSHIMA MASATO
分类号	C30B25/14;H01L21/205	主分类号	C30B25/14
代理机构		代理人
主权项
地址

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