| 摘要 |
PURPOSE:To lessen the film decreasing and film roughening at the time of stepper exposing with g rays and to enhance the resolution by using the specific compd. CONSTITUTION:This compd. consists of a polymer essentially consisting of the constitutional unit of formula I, the compd. contg. an unsatd. bond dimerizable or polymerizable by chemical rays and amino group (quaternary salt), the cumarine compd. of formula II, and an arom. monoazide compd. (having a neutral or acidic substituent). In the formula, R1 denotes a trivalent or quadrivalent org. group having >=2 pieces of carbon atoms; R2 denotes a bivalent org. group having >=2 pieces of carbon atoms; R3 denotes hydrogen or the paired ion of an alkaline metal; n denotes 1 or 2; R4, R5 denote a univalent org. group having >=2 pieces of carbon atoms; R6 denotes a univalent org. group having >=3 pieces of carbon atoms. |
