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发明名称
ETCHING SOLUTION
摘要
申请公布号
JPH08104988(A)
申请公布日期
1996.04.23
申请号
JP19940241706
申请日期
1994.10.05
申请人
SHARP CORP
发明人
ISHII YORISHIGE;INUI TETSUYA;MATOBA KOJI;HIRATA SUSUMU;ABE SHINGO;TERAJIMA SHIGEO
分类号
C23F1/32;B81C99/00;H01L21/308;(IPC1-7):C23F1/32
主分类号
C23F1/32
代理机构
代理人
主权项
地址
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