| 摘要 |
PURPOSE:To prepare an AlN sintered product having high strength and high thermal conductivity in good productivity by defatting an AlN sintered product containing Y2O3, heating the product under a specific condition in a nitrogen stream and sintering the product under ordinary pressure. CONSTITUTION:A mixture of AlN as a main component and 0.5-10wt.% of Y2O3 as a sintering auxiliary is molded, defatted, heated so as to give a linear shrinkage rate of >=0.2%/hr at temperature of >=1500 deg.C and sintered at 1750-1950 deg.C under ordinary pressure. The further addition of carbon or a com pound producing the carbon on a calcination in an amount of 0.01-0.1wt.% readily gives a high thermal conductivity of >=170W/mK. |
