发明名称 MANUFACTURE OF PIEZOELECTRIC ELEMENT TYPE ACTUATOR
摘要 PURPOSE:To reduce the cost of predetermined number of parallel piezoelectric actuators, to make an electrostrictive amount uniform and to improve a printing quality by forming predetermined number and shape and size of cut grooves on a laminated piezoelectric board of an integral structure, separating it except a bottom, and forming the actuators. CONSTITUTION:Cut grooves 13 reaching a ceramic part (an inactive layer) of a lowermost layer are formed on a laminated piezoelectric ceramic board 12 of an integral structure to become a base material, the other part except the bottom of the inactive layer is separated, and piezoelectric actuators 14 of a plurality of independent columnar active ceramic layers are formed. Then, an inner electrode 23, an outer electrode 24, an inner insulating layer 25, a leads 26, etc., are added. The actuators of such a structure are formed with a plurality of cut grooves 16 at a predetermined pitch parallel to one side (short side) of a rectangular laminated piezoelectric element 15 until they reach the layer when various shapes of wire dot printing head is used, the part except the bottom is separated, and independently pectinated piezoelectric actuators 14 are formed.
申请公布号 JPH0449053(A) 申请公布日期 1992.02.18
申请号 JP19900159311 申请日期 1990.06.18
申请人 FUJITSU LTD 发明人 KIMURA TASUKE
分类号 B41J2/295;B06B1/06;B41J2/235;H01L41/083;H02N2/00 主分类号 B41J2/295
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