| 摘要 |
PURPOSE:To easily perform high-accuracy alignment by providing luminous flux displacing means for displacing luminous flux between a light source and a 1st mark and adjusting the irradiation of the 1st and 2nd marks with modulated luminous flux. CONSTITUTION:This device is equipped with an objective 24 which guides modulated luminous flux from the 1st alignment mark 22 irradiated with a couple of pieces of modulated luminous flux to the 2nd alignment mark 30 to generate beat luminous flux and a position signal generation part 42 which generates a position signal indicating the optical relative position relation between the 1st mark 22 and 2nd mark 30 with the beat luminous flux from the 2nd mark 30. Then the luminous flux displacing means 14 and 16 which displace the luminous flux are provided between the 1st mark 22 and 2nd mark 30. Consequently, the optical position relation between the 1st mark 22 and 2nd mark 30 can easily be set with high accuracy. Consequently, bodies which are provided with the 1st mark 22 and 2nd mark 30 respectively can be aligned efficiently with high accuracy. |
