A calibration disk for a laser based inspection tool (LIT) for inspecting planar surfaces is described. The calibration disk has a plurality of overlapping bumps forming a circular ring with a width of one bump. The circular ring of bumps forms a feature of a known width and position on a disk which can be used to adjust one or more LIT's to yield calibrated results.
申请公布号
US5847823(A)
申请公布日期
1998.12.08
申请号
US19970840355
申请日期
1997.04.28
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
IMAINO, WAYNE ISAMI;JULIANA, JR., ANTHONY;LATTA, MILTON RUSSELL;LEE, CHARLES H.;LEUNG, WAI CHEUNG;ROSEN, HAL J.;BRANNON, JAMES HAMMOND