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发明名称
PRODUCTION OF THIN FILM BY VAPOR DEPOSITION WITH LASER
摘要
申请公布号
JPH0441666(A)
申请公布日期
1992.02.12
申请号
JP19900149260
申请日期
1990.06.07
申请人
SUMITOMO ELECTRIC IND LTD
发明人
TANAKA SABURO;NAKANISHI SHUSUKE;ITOZAKI HIDEO
分类号
C23C14/28
主分类号
C23C14/28
代理机构
代理人
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