Superhard material film structure, process of making and use of same.

摘要

A multi-layer diamond film (14) is grown by d.c. arc assisted plasma deposition. A series of layers (18) are deposited on each other by periodically back-etching the surface and renucleating during deposition. There may also be deposited a thin layer (20) of non-diamond carbon material between the diamond layers, but no other non-carbon material. Renucleation is controlled by varying the proportion of methane to hydrogen in the feed gases, by temperature cycling of the substrate, or by inducing modal changes in the arc.