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发明名称
MOLECULAR BEAM CELL
摘要
申请公布号
JPH0439920(A)
申请公布日期
1992.02.10
申请号
JP19900148298
申请日期
1990.06.05
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
UCHIYAMA KIYOSHI;ABE TOMOKO;YOKOZUKA TATSUO;TAKAMORI AKIRA;NAKAJIMA MASATO
分类号
C30B23/08;H01L21/203
主分类号
C30B23/08
代理机构
代理人
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