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经营范围
发明名称
SPUTTERING TARGET AND ITS PRODUCTION
摘要
申请公布号
JPH0436463(A)
申请公布日期
1992.02.06
申请号
JP19900144699
申请日期
1990.06.01
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
ISOMURA HIDEMI;AKIYAMA TETSUYA;OTA TAKEO
分类号
B22F3/14;C22C1/04;C23C14/34
主分类号
B22F3/14
代理机构
代理人
主权项
地址
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