| 摘要 |
PURPOSE:To realize effective use of space in a device by moving a substrate holding means and a positioning pin table relatively so that a plurality of positioning pins, planted on the positioning pin table, enter into positioning holes in a plurality of substrates being held. CONSTITUTION:Eight positioning pins 25 are provided, with predetermined intervals, so that two positioning pins 25 enter into two positioning holes 3A made through one substrate. When four substrates 3 are carried to a predetermined position from an upstream device, rod 21 of cylinder 20 moves downward to cause downward motion of shoot supporting tables 16, 17 through a pressure contact lever 18. Consequently, the substrate 3 held on substrate carrying shoots 1, 2 are lowered and the positioning pin 25 enters into the positioning hole 3A of the substrate 3 thus positioning the substrate 3. |
