| 摘要 |
PURPOSE:To prevent a generation of cracks or delamination caused by deformation of a circumferential part of a substrate during a firing process by effecting the firing in a state that the circumferential part of a green sheet lamination body where a remaining stress concentrates is removed by cutting. CONSTITUTION:In a wiring region 2 arranged in a center of a surface, plural green sheets on which a conductor pattern has been printed are laminated in a mold of approximately rectangular shaped in a plan while keeping an interlayer-connection through vias formed by filling small holes with conductors. After that, they are a pressed from above to make a lamination body 1. It is sent to a firing furnace, where a ceramic substrate is formed. At this time, in advance of a firing process using a firing furnace, a circumferential part of the lamination body 1 is cut except the slight-distance part from the siring region 2 left. As a result, a difference in density of the whole does not become large and also a point where a remaining stress concentrates does not remain the lamination body 1 before firing. |
