| 摘要 |
PURPOSE:To accurately perform monitoring along a monitoring purpose by performing monitoring decision by calculating the feature quantity of a monitoring area by magnifying a feature area by prescribed number of picture elements after eliminating a noise on a screen. CONSTITUTION:A differential image can be obtained by performing image pickup and binary coding setting a substrate before element packaging as a preceding image and the substrate after packaging as a succeeding image. Thence, one picture element with runlength less than prescribed horizontal and vertical effective runlength Lhe, Lve is eliminated to eliminate noise parts S2 in horizontal and vertical directions in an element packaging part S1 and a noise part S2 in the monitoring area S. Then, the picture element is magnified by prescribed number of expansion picture elements in both horizontal and vertical directions. Therefore, aberration when the element is packaged can be permitted. Thence, when the extraction of the monitoring area T is completed, the block is divided into N inspection blocks Q, and the decision for the normal/defective condition of the block is performed by counting the number of significant picture elements in a normal image i.e. the number of picture elements of binary-coded differential image between the preceding image and the succeeding image. |
