| 摘要 |
PURPOSE:To provide a high energy resolution without causing a large sized construction of the device concerned, by furnishing an electrostatic lens for beam deceleration, decelerating an ion beam incident to between flat plate electrodes in parallel arrangement, and at the same time, suppressing dispersion of the beam. CONSTITUTION:An ion beam consisting of charged particles having passed through plasma is left incident between parallel electrodes 10a, 10b on which a specified voltage is impressed 11, and the energy of charged particles is analyzed on the basis of the distance at which the ion beam deflected by the electric field thus generated has attained. In this device, a beam decelerating electrostatic lens 12 is provided consisting of a plurality of electrodes to generate an electric field E2 which decelerates the ion beam and suppresses its spread along the incident path when ion beam is cast onto the parallel electrodes 10a, 10b. Because ion beam is decelerated, it is no more needed to lengthen the ion beam attaining distance. This provides a high energy resolution without causing the device to be constructed in a large size.
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