发明名称 WORK POSITIONING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a work positioning device by which a work can speedily and precisely be positioned by simple structure. SOLUTION: The lower surface of the periphery of the nearly disk-like work W is supported by a plurality of receiving tools 12, and the plurality of receiving tools 12 and 12 are made to approach each other. Thus, the work positioning device 10 positions the work W at a prescribed position. Each receiving tool 12 of a plate-like member has a circular-arc bank 14 with an inner diameter nearly equal to the outer diameter of the work, an arcuate inner edge 16 with an inner diameter smaller than the outer diameter of the work, and a tapered part 18 connected to the upper edge of the inner edge 16 while tilting downward from the lower edge 14A of the bank. The lower surface of the periphery of the work W is supported by the tapered part 18. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004363452(A) 申请公布日期 2004.12.24
申请号 JP20030162100 申请日期 2003.06.06
申请人 TOKYO SEIMITSU CO LTD 发明人 YAMADA SATOHIKO
分类号 H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/68
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