| 摘要 |
PURPOSE:To form the glass waveguide of a low loss by constituting tablets of lumps of >=10mum particles at the time of forming films on substrate surfaces by irradiating the tablets with electron beams. CONSTITUTION:The tablets 9, 10 consisting of the lumps of the particles contg. rare earth elements and SiO2 and having >=90% sintering density and >=10mum grain size are heat treated at the temp. slightly lower than the m.p. The sintering density is, therefore, increased and the tablets 9, 10 consisting of the lumps of at least 10mum particles are obtd. Since the tablets 9, 10 consist of the lumps of >=10mum particles, the simultaneous splashing of the particles around the irradiated parts does not arise at the time of forming the films 11 on the substrate 5 surfaces by irradiating the tablets 9, 10 with the electron beams. The glass films 11 for cores without contg. the fine particles of several mum are thus formed. The flush type waveguide of the low loss is thus formed. |
