SEMICONDUCTOR WAFER PROCESSOR,申请号JP19900120531-传众专利搜索

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发明名称	SEMICONDUCTOR WAFER PROCESSOR
摘要
申请公布号	JPH0417324(A)	申请公布日期	1992.01.22
申请号	JP19900120531	申请日期	1990.05.10
申请人	SHIN ETSU HANDOTAI CO LTD	发明人	TATE NAOTO;HOSOKAWA KAORU;TOMITA MUNENORI;TASHIRO TOMOHIRO
分类号	H01L21/205;H01L21/31	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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