发明名称 METALLIC VAPOR LASER
摘要 PURPOSE:To increase operation efficiency by extending carrier means which is inactive with atmosphere inside a laser chamber to the interior and exterior of a laser pipe, moving it from the exterior of the laser pipe and disposing a metallic pellet the carrier means. CONSTITUTION:A plurality of metallic pellets 4a mounted on ceramic fibers 8 are placed in a row on the bottom inside a laser pipe 1. The ceramic fiber 8 extends from one opening of the laser pipe 1 and to the other opening, and taken up on a take-up pulley 9c by means of suspending pulleys 9a, 9b before and after the laser pipe 1. A plurality of unused metallic pellets 4b mounted on the ceramic fiber 8 stand by on the side opposite to the take-up pulley 9c, and in turn sent into the laser pipe 1. If the metallic pellet 4a inside the laser pipe 1 wears out and the power decreases to a predetermined value, the ceramic fibers 8 are in turn wound to the outside, and at the same time a pair of new pellets 4b are loaded from the other opening. As a result, new metallic pellets can easily be supplied.
申请公布号 JPH0415968(A) 申请公布日期 1992.01.21
申请号 JP19900118607 申请日期 1990.05.10
申请人 NIKON CORP 发明人 HARA HIDEO;TOKUDA KENSHO
分类号 H01S3/036 主分类号 H01S3/036
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