ADJUSTING METHOD FOR MOLECULAR BEAM INTENSITY,申请号JP19900117593-传众专利搜索

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发明名称	ADJUSTING METHOD FOR MOLECULAR BEAM INTENSITY
摘要
申请公布号	JPH0416233(A)	申请公布日期	1992.01.21
申请号	JP19900117593	申请日期	1990.05.09
申请人	HITACHI LTD	发明人	OGAWA YOSHIFUMI
分类号	C30B23/08;B01J19/08;H01L21/203	主分类号	C30B23/08
代理机构		代理人
主权项
地址

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