| 摘要 |
PURPOSE:To improve dimensional accuracy through a simple process by laminating several layers of piezoelectric element layers or electrostriction element layers and conductive metal layers, bonding or applying an abrasion resistant thin board member to the end in the laminating direction and then cutting into same size in the laminating direction. CONSTITUTION:Electrodes 2 are applied on the opposite faces of a piezoelectric ceramics 1 polarized in the direction of thickness. The piezoelectric ceramics 1 are then laminated such that the direction of polarization alternates sheet by sheet thus producing a base body 3. An abrasion resistant thin board member 4 is then bonded to the uppermost part of the base body 3. The base body 3 is then cut along a dash line B and the ends of every other electrodes 2, exposed to the side faces 6, 7, are notched to form insulating parts 8. External electrodes 9, 10 are then provided on the side faces 6, 7 and the piezoelectric ceramics is cut along a dash line E. According to such processes, highly durable multilayer piezoelectric actuators having same dimension can be mass produced and when such actuator is employed as the drive source for an ultrasonic motor, a highly accurate and durable miniature ultrasonic motor can be obtained. |
