| 摘要 |
<p>A charged particle analyzer comprises a spherical grid (1), a spherical electrode (2) concentric therewith, an emission portion (W) for emitting charged particles, a screen plate (3) having an exit opening (A), a plurality of second spherical grids (8,81,91,9) forming a high pass filter for the charged particles, a detector (4) for detecting the charged particles, and an obstacle ring (10) being in parallel with an equatorial plane normal to a line connecting the emission portion and the center of the exit opening with being within the spherical electrode (2). <IMAGE></p> |
