| 摘要 |
of the Invention A pre-assembled, self-contained clean room module has everything necessary for maintaining the cleanliness, temperature, humidity and pressurization required for the work space within it. The module is factory built rather than built on site. The module has a mobile base unit (15) with a sealed sump area beneath its floor. The module also has its own selfcontained air conditioning unit which has a main recirculating air system (57,44) and a diverted air system (50, 51, 52) which contains make-up air with a portion of the recirculating air, conditions the combined air and injects the conditioned air upstream of a fan (44) in the main system. Only about 5-20% of the recirculated air is fed through the air conditioning equipment in the diverted air system. A make-up air damper (81) is controlled by pressure within the clean room. Three module units can be combined with a master unit having its air conditioning unit (21) treating the air for the other units which function as slaves. |
