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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH043973(A)
申请公布日期
1992.01.08
申请号
JP19900106014
申请日期
1990.04.20
申请人
MITSUBISHI ELECTRIC CORP
发明人
KOMORI SHIGEKI
分类号
H01L21/8238;H01L27/092;(IPC1-7):H01L27/092
主分类号
H01L21/8238
代理机构
代理人
主权项
地址
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