发明名称 Method of fabricating a raised source/drain transistor
摘要 A raised source/drain transistor is provided having thin sidewall spacing insulators (54) adjacent the transistor gate (48). A first sidewall spacer (64) is disposed adjacent thin sidewall spacing insulator (54) and raised source/drain region (60). A second sidewall spacer (66) is formed at the interface between field insulating region (44) and raised source/drain region (60).
申请公布号 US5079180(A) 申请公布日期 1992.01.07
申请号 US19900568305 申请日期 1990.08.16
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 RODDER, MARK S.;CHAPMAN, RICHARD A.
分类号 H01L21/336;H01L29/08 主分类号 H01L21/336
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