| 摘要 |
PURPOSE:To correctly compensate backgrounds of all data by providing a means for generating an electron beam, a detector, an absorption current detector and a background compensating and calculating means. CONSTITUTION:An electron beam (e) is radiated to a specimen S from an electron beam source 1. Outputs from an X-ray detector 4 and an absorption current detector 5 are stored in image memories 7, 8 via a data write-in unit 6. A background compensating and calculating unit 10 produces a graph indicating a relation between background and absorption current from the results of background intensity and the absorption current value. Based on this graph, a two-dimensional distribution graph of the background intensity is calculated from two-dimensional distribution data of the absorption current data. This background peak is subtracted from peak data of an element to be analyzed, which has been stored in the memories 7, 8 to obtain compensated data, and this is stored in a memory 11 as well as displayed on a color CRT 12. |
