| 摘要 |
Method of manufacturing a transistor on a layer made of a first crystalline semiconducting material to make a channel, deposited on a dielectric layer, the method including the following steps: epitaxial growth of zones made of a second semiconducting material on the layer made of a first crystalline semiconducting material, so as to form source and drain blocks with the layer made of a first crystalline semiconducting material on each side of the channel, the second semiconducting material having a lattice parameter different from that of the first semiconducting material, in-depth amorphisation of part of zones made of a second semiconducting material so as to keep only one layer of second crystalline semiconducting material on the surface of the source and drain blocks, and amorphisation of zones of the layer made of a first semiconducting material located under zones made of a second semiconducting material, recrystallisation of the source and drain blocks such that the second semiconducting material imposes its lattice parameter on the source and drain zones. |
