SURFACE CONDITION CHECK OF SEMICONDUCTOR BOARD,申请号JP19900097386-传众专利搜索

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发明名称	SURFACE CONDITION CHECK OF SEMICONDUCTOR BOARD
摘要
申请公布号	JPH03295251(A)	申请公布日期	1991.12.26
申请号	JP19900097386	申请日期	1990.04.12
申请人	SUMITOMO ELECTRIC IND LTD	发明人	SAITO YOSHIHIRO
分类号	G01R31/26;H01L21/66	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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