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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03292721(A)
申请公布日期
1991.12.24
申请号
JP19900095731
申请日期
1990.04.10
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
ITO YUTAKA
分类号
H01L21/20;H01L21/263;H01L21/268;H01L21/84
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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